KAIJO JAPAN Precision cleaning Megasonic Clearing (HI MEGASONIC)
2024-03-25 14:29:20
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KAIJO JAPAN
Precision cleaning
Megasonic Clearing (HI MEGASONIC)
Wafer size | Transducer plate modele for 6" wafer | Transducer plate modele for 8" wafer | Transducer plate modele for 12" wafer |
Model | 7857S | 8857S | 98SL |
Maximum input power | 300Wx4 | 300Wx6 | 300Wx16 |
Frequency | 950kHz | 950kHz | 750kHz |
Effective area(mm) | 136x163 | 165x215 | 275x319 |
Plate material | SU316L | SU316L | SU316L |
Transducer elements | PZT | PZT | PZT |
Heat-resistant temperature | 70℃ | 70℃ | 70℃ |
Outer dimendions | 185x215x55 | 255x305x55 | 410x340x65 |
Installation | Bolt fixation | Bolt fixation | Bolt fixation |