KAIJO JAPAN Precision cleaning Megasonic Clearing (HI MEGASONIC)

2024-03-25 14:29:20 admin

KAIJO JAPAN

Precision cleaning

Megasonic Clearing (HI MEGASONIC)

Wafer size

Transducer plate modele for 6" wafer

Transducer plate modele for 8" wafer

Transducer plate modele for 12" wafer

Model

7857S

8857S

98SL

Maximum input power

300Wx4

300Wx6

300Wx16

Frequency

950kHz

950kHz

750kHz

Effective area(mm)

136x163

165x215

275x319

Plate material

SU316L

SU316L

SU316L

Transducer elements

PZT

PZT

PZT

Heat-resistant temperature

70℃

70℃

70℃

Outer dimendions
(WxDxHmm)

185x215x55

255x305x55

410x340x65

Installation

Bolt fixation

Bolt fixation

Bolt fixation



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